Complete Non-Contact Inspection system for OLED/TFT/LTPS
| Pattern damage, particles | Causes no damage, particle-free |
|---|---|
| Reliability | Minimizes possibility of measurement error due to dust on pattern surface |
| Change of inspection object | By switching recipe, no need for physical readjustment |
| Tact time | Approximately100 sec. G8 panel |
| Detectable pitch | Minimum pitch 50um, minimum line width 3um |
| Running cost | No running cost |
